The Making Of A Chip

 


A complex process

Manufacturing a computer chip is a complex process involving hundreds of steps and requiring from a few days to up to three months of processing time to complete. Chip making demands incredible precision, careful attention to detail, and constant testing.

IBM is a leader in chip manufacturing, and has invested extensively in its world-class facilities to be able to produce some of the most advanced memory, logic, and microprocessor chips in the industry.

 


From Sand to Silicon

Silicon is the crucial building block in the fabrication of computer chips. Raw silicon is first extracted from common sand. A series of chemical steps refine it until the purity level reaches 99.9999999 percent. Thus, for every ten billion atoms, only one non-silicon atom can be permitted. That is like one tennis ball in a line of ping pong balls stretching from the earth to the moon.

Silicon ingots are then "grown" from the purified molten silicon and sliced into round wafers ranging from 150mm to 200mm
(6 to 8 inches) in diameter with a thickness about that of a credit card.


A three-dimensional world

 

The structure of a computer chip is complex, both on its surface and in its internal three-dimensional composition. The chip is made up of many layers, each of which is a detailed pattern. Some of the layers lie within the silicon wafer and others are stacked on top. The manufacturing process consists of forming this sequence of layers very precisely.

For example, a thin layer of silicon dioxide, an insulating material, may be "grown" on the surface of the wafers. Microscopically small circuits, some 250 times smaller than a human hair, are then built on this and successive layers of silicon dioxide. Microminiature areas on these wafers can then be turned into electrical conductors by adding minute amounts of impurities, known as dopants, at selected areas in these detailed patterns.

 

 


Like printing a book-in miniature

The detailed patterns are created on the layers of the silicon dioxide using a century-old printing technique called photolithography. A thin layer of light-sensitive polymer, called photoresist, is applied over the silicon dioxide. Ultraviolet light projected through a glass mask-so thin that "pin holes" a few atoms wide can render it unusable-print each layer's circuit pattern on the photoresist.

The unexposed photoresist is washed away in solvent baths, etching the protective oxide layer with the shape of the circuit patterns. Tiny holes are then etched into the oxide layer in preparation for the next major process step.

 


Cleaner than clean

Although a photolithographic process is used to print the circuit patterns on the chip, this process is millions of times more precise than the process used by the printing industry. This and other operations are performed by computer-controlled robotic devices in "clean rooms" that are a thousand times cleaner than a hospital operating room. No human hand is ever allowed to touch a wafer. Workers are garbed in "bunny suits" that cover them from head to toe. The air is continuously filtered and recirculated to keep the dust level at an absolute minimum. Temperature, barometric pressure, and humidity are controlled to unheard of tolerances in order to protect microscopic circuits that, in some advanced IBM technologies, measure slightly more than a polio virus. In fact, a single particle of smoke, if it were allowed to infiltrate a semiconductor "white room," could destroy an entire chip.

 

 

 

 


Doped Silicon

After the circuit patterns have been printed, the wafer is then "doped" with more impurity atoms, such as boron or phosphorus, to form positive and negative conducting regions. The dopant atoms are ionized (stripped of one or more of their electrons) and accelerated to a high energy in ion implantation chambers. The ions bombard the silicon wafer and penetrate the holes etched in the protective oxide layer. The depth and concentration of these impurities determine the specific              electrical characteristics of the chip.

 

 

 

 


Again and again

The processes of oxidation, photolithography, etching, and ion implantation are repeated many times to build the transistors and other electronic circuitry that make up each chip on a wafer.

 

 


Tiny highways

Once the electronic components have been fabricated in the silicon, thin metallic and doped polysilicon films are added to form the interconnections among individual transistors and other devices. On some IBM logic chips, there may be up to six layers of these minute interconnecting wires joining together over four million circuits. A protective coating of polysilicon is then deposited on the wafers to protect the chips from moisture, corrosion, and atmospheric contamination.

 

A close up view

Low-angle scanning electron micrograph of a portion of a partially completed SRAM array containing six-device memory cells. The insulating oxide films have been removed, revealing the lower levels of the interconnection structure of the array.

The word lines (colored green) are salicided polysilicon lines (running horizontally). The local interconnections (tungsten; colored pink) provide cross-coupling for the n+ and p+ diffusion contacts and act as the lower portions of the contact studs to the first global interconnection level Ti/A1(Cu)/Ti/TiN; (colored yellow). The contact studs (tungsten; colored grey) constitute the upper portions of the contact paths to the global interconnections.


Testing, testing and more testing

At each step of the process, wafers are tested with specially designed equipment under computer control, some of which measure events on an atomic scale. When the metalization process is completed, all the chips on a wafer are tested again. Those that pass the rigorous electrical tests are then cut from the wafer with high-speed, water-cooled diamond cutting saws and mounted in metal or plastic packages, called modules. These modules are then tested again.

Each tiny memory cell that holds a bit of information, and every circuit must be tested. Since only one of IBM's advanced eight-inch memory wafers contain as many memory cells as there are people on earth, it takes extraordinary care and precision to produce reliable chips.


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